MAX TECH
By Uses
MAX-TECH PRODUCTS INFO.
Ceramics for Semi-Conductor & Display
- Inner components of etcher and durable materials of diffusion furnace can be made of alumina, silicon carbide, quartz, aluminum nitride and yttria.
- Specific processes of manufacturing can set limits to the selection of materials.
| Material | Usage |
| Quartz (SiO2) | Diffusion Furnace, Inner Components for CVD, Crucible |
| Alumina (Al2O3) | Anti-Plasma Etcher, Inner Components for CVD, Inner Components for ESC Chuck |
| Silicon Carbide (SiC) | Diffusion Furnace, Inner Components for CVD, Crucible |
| Aluminium Nitride (AIN) | ESC Chuck, Heater |
| Yttria (Y2O3) | Anti-Plasma Etcher components |
MAX-TECH PRODUCTS INFO.
Anti-Plasma Ceramics
- Anti-plasma ceramics can be used for dry-etching equipments and CVD devices in semi-conductor and display industry.
- Having strong chemical-resistance to etching gases including hydrogen fluoride, anti-plasma ceramics can improve the durability of equipments and devices and can reduce defects of products caused by particle issues.
- Especially, of components and parts of etcher, focus ring, dome, and showerhead, etc. need the property of anti-plasma.
| Product Name | Bulk Density(g/cm3) | Etch rate(cm/min) | Flexural Strength(MPa) |
| Alumina(Al2O3) | 3.9 | 1.3×10-6 | 360 |
| MAPC-Y | 4.4 | 7.3×10-7 | 370 |
| MAPC-Z | 4.2 | 1.5×10-5 | 600 |
| Yttria (Y2O3) | 4.9 | 5.0×10-8 | 130 |
MAX-TECH PRODUCTS INFO.
Abrasion-resistant Ceramics
Materials like alumina, zirconia, ZTA, silicon carbide, silicon nitride can be made into abrasion-resistant ceramic parts and components for pump, paper manufacturing equipments, textile machines, bead mills, x-y stage table, and nozzle, etc..
MAX-TECH PRODUCTS INFO.
Heat-resistant Ceramics
Materials like alumina, cordierite, zirconia, silicon carbide, silicon nitride can be made into burner head, nozzle, crucible and welding cup etc..
MAX-TECH PRODUCTS INFO.
Electricity-insulating Ceramics
- Ceramics for the most part contain oxides and generally have outstanding electricity-insulating property.
- It is necessary to use ceramics as excellent electricity-insulating materials from domestic circuit breakers to high-tech electronic equipments in electrical and electronic industries.
- Electricity-insulating ceramics of electric circuits not only can separate conductors and semi-conductors physically and electrically, but also can accompany the following performances like keeping and boosting the mechanical strength of conductors and semi-conductors, releasing and blocking heat, and protecting electric circuits from corrosive environments.
MAX-TECH PRODUCTS INFO.
Chemical-resistant Ceramics
- Superior to metals in chemical stability and abrasion-resistance, ceramics can be widely used in fluid and chemical machinery field where acid and alkaline chemicals, corrosive fluids, and abrasive fluids are dealt with.
- With alumina, silicon carbide, and silicon nitride, following items can be produced: chemical pumps like acid- and alkaline-resistant pumps, high-pressure pumps, metering pumps, pumps for special purposes like molten metal pumps and underwater pumps, machines for chemicals like flowmeter, industrial mixer etc., mechanical seals, bearings, and shafts and so on.
| materials | Al2O3 | MgO | ZrO2 | TiO2 | SiO2 | SiC | BN | TiN |
| acid liquid and gas | excellent | bad | excellent | excellent | excellent | excellent | possible | possible |
| alkaline liquid and gas | good | excellent | excellent | bad | bad | possible | excellent | possible |
| molten metal | excellent | excellent | excellent | possible | possible | possible | excellent |
MAX-TECH PRODUCTS INFO.
Electric Conductive Ceramics
- Electric conductive ceramics are peculiar materials that not only hold the excellent mechanical properties of ceramics but also are made to have electric conductivity.
- Electric conductive ceramics such as ceramic electrodes can stand uncommon environments better such as at a high temperature or in an oxidizing atmosphere than metallic electrodes
| Product Name | Bulk Density(g/cm3) | Volume Resistivity(Ω·cm) | Flexural Strength(MPa) |
| MCC-G | 3.7 | 104 | 320 |
| MCC-SC | 3.9 | 105 | 400 |
MAX-TECH PRODUCTS INFO.
Low-reflective Ceramics
- Low-reflective ceramics are made as subsidiary materials to prevent photo-reflectance for semi-conductor and display manufacture, especially for LCD and OLED lithography.
| property | spec. | |
| reflection ratio (at 360nm) | SCI | 5.91% |
| SCE | 5.98% | |
| density | 3.89g/cm2 | |
| flexural strength | 300Mpa | |
| Poisson’s ratio | 0.26 | |
| Young’s modulus | 334Gpa | |
| surface roughness (Ra) | 1.3㎛ | |
| flatness | 0.005mm | |
| parellelism | 0.01mm | |
| size | 500*1000 |
